Microstructures, electronics, nanotechnology – these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. In this volume, authors from three major competence centres for microengineering illustrate step by step the process from designing and simulating microcomponents of metallic and ceramic materials to replicating micro-scale components by injection molding.

техническая литература

технические науки

Microengineering of Metals and Ceramics, Part I

Resonant MEMS. Fundamentals, Implementation, and Application

Thermoelectric Energy Conversion. Basic Concepts and Device Applications

Micro Energy Harvesting

System-level Modeling of MEMS

Micro- and Nanomanipulation Tools

Enabling Technologies for MEMS and Nanodevices. Advanced Micro and Nanosystems

Micro Process Engineering. Fundamentals, Devices, Fabrication, and Applications

CMOS - MEMS